Clean manufacturing, reimagined

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Abstract

Precision cleaning requires technology that provides improved performance, productivity, environmental quality and economics, all while adapting to rapidly evolving device manufacturing technology. In response to these new pressures, solvent-based cleaning processes have re-emerged to prevent malfunctions in high-reliability or high-power applications, necessitating a green process solution. A precision cleaning technology called centrifugal CO2 cleaning combines unique centrifugal dry washing and rinsing processes using specially formulated high-boiling solvents such as citrus terpenes and paraffins with recycled carbon dioxide in a tunable cleaning solvent system.